|
组分名称及浓度范围
|
平衡气 |
|
H2 5ppm
CH4 5ppm O2 5ppm
CO 5ppm N2 5ppm
CO2 5ppm
|
Ar |
|
H2 10ppm
CO2 10ppm O2 10ppm
N2O 10ppm N2 10ppm
Kr 10ppm CH4
10ppm Xe 10ppm CO
10ppm
|
He |
|
H2 5ppm
N2 300ppm Kr 300ppm
CH4 5ppm Xe
2000ppm
CO 5ppm Ar 5ppm
|
O2 |
|
H2 10ppm
CH4 10ppm O2 10ppm
CO 10ppm N2 10ppm
|
Ne |
|
充装压力
|
10.0MPa(35℃) |